JPH0375975B2 - - Google Patents

Info

Publication number
JPH0375975B2
JPH0375975B2 JP60132138A JP13213885A JPH0375975B2 JP H0375975 B2 JPH0375975 B2 JP H0375975B2 JP 60132138 A JP60132138 A JP 60132138A JP 13213885 A JP13213885 A JP 13213885A JP H0375975 B2 JPH0375975 B2 JP H0375975B2
Authority
JP
Japan
Prior art keywords
ion
cathode
ions
acceleration
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60132138A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61290629A (ja
Inventor
Tamio Hara
Manabu Hamagaki
Katsunobu Aoyanagi
Susumu Nanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP60132138A priority Critical patent/JPS61290629A/ja
Priority to EP86107195A priority patent/EP0203573B1/en
Priority to DE86107195T priority patent/DE3688860T2/de
Priority to CA000510112A priority patent/CA1252581A/en
Priority to US06/868,350 priority patent/US4749910A/en
Publication of JPS61290629A publication Critical patent/JPS61290629A/ja
Publication of JPH0375975B2 publication Critical patent/JPH0375975B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP60132138A 1985-05-28 1985-06-18 電子ビ−ム励起イオン源 Granted JPS61290629A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60132138A JPS61290629A (ja) 1985-06-18 1985-06-18 電子ビ−ム励起イオン源
EP86107195A EP0203573B1 (en) 1985-05-28 1986-05-27 Electron beam-excited ion beam source
DE86107195T DE3688860T2 (de) 1985-05-28 1986-05-27 Mittels Elektronenstrahl angeregte Ionenstrahlquelle.
CA000510112A CA1252581A (en) 1985-05-28 1986-05-27 Electron beam-excited ion beam source
US06/868,350 US4749910A (en) 1985-05-28 1986-05-28 Electron beam-excited ion beam source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60132138A JPS61290629A (ja) 1985-06-18 1985-06-18 電子ビ−ム励起イオン源

Publications (2)

Publication Number Publication Date
JPS61290629A JPS61290629A (ja) 1986-12-20
JPH0375975B2 true JPH0375975B2 (en]) 1991-12-04

Family

ID=15074250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60132138A Granted JPS61290629A (ja) 1985-05-28 1985-06-18 電子ビ−ム励起イオン源

Country Status (1)

Country Link
JP (1) JPS61290629A (en])

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2526228B2 (ja) * 1987-01-31 1996-08-21 東京エレクトロン株式会社 電子ビ―ム式プラズマ装置
JP2724461B2 (ja) * 1987-12-30 1998-03-09 東京エレクトロン株式会社 電子ビーム励起イオン源
JPH01189838A (ja) * 1988-01-25 1989-07-31 Nissin Electric Co Ltd イオン源
GB2230644B (en) * 1989-02-16 1994-03-23 Tokyo Electron Ltd Electron beam excitation ion source
US5252892A (en) * 1989-02-16 1993-10-12 Tokyo Electron Limited Plasma processing apparatus
JP2794602B2 (ja) * 1989-02-28 1998-09-10 東京エレクトロン株式会社 電子ビーム励起イオン源
JPH0340342A (ja) * 1989-07-06 1991-02-21 Akira Oota イオンビーム照射装置
JP2704438B2 (ja) * 1989-09-04 1998-01-26 東京エレクトロン株式会社 イオン注入装置
JP2733629B2 (ja) * 1989-10-27 1998-03-30 東京エレクトロン株式会社 イオン生成方法およびイオン生成装置
JP2791911B2 (ja) * 1989-11-14 1998-08-27 東京エレクトロン株式会社 イオン源
JP2822249B2 (ja) * 1990-01-11 1998-11-11 東京エレクトロン株式会社 イオン源
US5326981A (en) * 1991-09-27 1994-07-05 Kawasaki Jukogyo Kabushiki Kaisha Electron beam excited ion irradiation apparatus
JP5524070B2 (ja) * 2007-10-22 2014-06-18 アクセリス テクノロジーズ， インコーポレイテッド ダブルプラズマイオンソース
JP5520555B2 (ja) * 2009-09-18 2014-06-11 株式会社アルバック イオン照射方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ROV.SCI.INSTRUM=1977 *

Also Published As

Publication number Publication date
JPS61290629A (ja) 1986-12-20

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